Edge inspection handling device - メーカー・企業と製品の一覧

Edge Inspection Handling Device (EHI-01 Type)

This is a device for visually inspecting the edges of φ300 mm silicon wafers (chip and chipping inspection).

Five wafers are transported from the FOSB to the inspection stage, and the wafers after inspection are returned to the same slot of the same FOSB. The wafers are handled using an edge clamp method.

• 企業：ジャステム
• 価格：Other

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment